Article ID Journal Published Year Pages File Type
5365230 Applied Surface Science 2012 6 Pages PDF
Abstract
► Thermal stability of ZnO:B films with different doping level and thickness grown by LPCVD technique are investigated. ► Total transmission of the films at near infrared wavelength range increases with the enhanced thermal treating intensity. ► Morphology of the ZnO:B films does not change after the thermal treatment. ► Film resistivity increases with increasing treating duration for the ZnO:B films. ► Chemisorption of oxygen into ZnO films is responsible for the decrease of carrier concentration after the heat treatment.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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