Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5365230 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠Thermal stability of ZnO:B films with different doping level and thickness grown by LPCVD technique are investigated. ⺠Total transmission of the films at near infrared wavelength range increases with the enhanced thermal treating intensity. ⺠Morphology of the ZnO:B films does not change after the thermal treatment. ⺠Film resistivity increases with increasing treating duration for the ZnO:B films. ⺠Chemisorption of oxygen into ZnO films is responsible for the decrease of carrier concentration after the heat treatment.
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Authors
H. Zhu, H. Jia, D. Liu, Y. Feng, L. Zhang, B. Lai, T. He, Y. Ma, Y. Wang, J. Yin, Y. Huang, Y. Mai,