Article ID Journal Published Year Pages File Type
5365592 Applied Surface Science 2007 5 Pages PDF
Abstract

We demonstrate the use of optical reflection mapping as an in situ characterization tool to evaluate the corrosion rate of compositionally graded thin film combinatorial libraries coated with a commercial glass etching paste. A multi-channel fiber-optically coupled CCD-array-based spectrometer was used to collect a series of reflectance maps from 300 to 1000 nm versus time. The thin film interference oscillations in the measured reflection spectra have been fitted to determine the film thickness as a function of time and thereby the etch rate. Application of this technique to an In-Mo-O composition spread library is presented as an example.

Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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