| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5365642 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠a-C coatings were synthesized by middle frequency pulsed unbalanced magnetron sputtering technique. ⺠The coating deposited at 120 V exhibited the optimized synthetic properties. ⺠The AES depth profile exhibited that the C element distributes uniformly and has penetrated into the Si substrate. ⺠The influences of substrate bias on the sp3 fraction can be explanted by the sub-plantation model. ⺠The coatings may be used as antireflection protection coatings.
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Authors
H.Y. Dai, Y.Q. Wang, X.R. Cheng, C.Y. Zhan, N.K. Huang,