Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5365645 | Applied Surface Science | 2012 | 4 Pages |
We report on the electromagnetic (EM) absorption potential and microwave heating capacity of amorphous hydrogenated silicon carbide thin films (a-SiC:H) in the 1-16 GHz frequency domain. a-SiC:H thin films with typical thickness of 1 μm were deposited by plasma enhanced chemical vapor deposition on [1 0 0] undoped silicon substrates, and exhibit a deep EM absorption - up to 96% of the total EM energy irradiation - which is systematically converted into heat. Two-wavelength pyrometer tests show that temperatures exceeding 2000 K can be reached in a very short time, less than 100 s exposure to microwaves, showing a promising potential for specific microwave heating applications.
Graphical abstractEM absorption tests show that temperatures exceeding 2000 K can be reached in a very short time, less than 100 s exposure to microwaves, showing a promising potential for specific microwave heating applications.Download full-size imageHighlights⺠We have PECVD grown a-SiC:H thin films on un-doped Si substrates. ⺠Our SiC films show deep EM absorption - up to 96% of the total EM irradiation. ⺠These SiC films have a high efficiency in converting EM absorption to heat. ⺠Temperature exceeding 2000 K reached in less than 100 s exposure to EM were obtained. ⺠Higher-quality SiC films could be obtained after their microwave heating.