Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5365711 | Applied Surface Science | 2010 | 4 Pages |
Abstract
Nanoscale magnesium oxide thin films have been deposited on glass substrate by thermal oxidation (in air) of vacuum evaporated magnesium films. X-ray diffraction (XRD) showed orientation along (2Â 0Â 0) and (2Â 2Â 0) directions. The mechanical properties of the MgO thin films were found to be the function of thickness (300, 450 and 600Â nm), oxidation temperature (573, 623 and 673Â K) and oxidation duration (90 and 180Â min). As oxidation temperature and oxidation duration increases, adhesion and intrinsic stress were found to increase. Intrinsic stress decreased whereas adhesion increased due to increase in thin film thickness. The value of intrinsic stress was in range 28.902-73.212 (Ã107Â N/m2) and that of adhesion was 12.1-27.4 (Ã104Â N/m2) for the thin film of thickness 300Â nm.
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Authors
Sikandar H. Tamboli, Vijaya Puri, R.K. Puri,