| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5365804 | Applied Surface Science | 2007 | 9 Pages |
Abstract
Zinc oxide based film bulk acoustic resonator as mass sensor was fabricated by multi-target magnetron sputtering under optimized deposition condition. Each layer of the device was well crystallized and highly textural observed by transmission electron microscopy and X-ray diffraction measurement. Through piezoelectric test, the device vibrated with significant distance. The influence of top electrode on resonant frequency and the bio-specimen of mass loading effect were investigated. Data show that the device has qualified properties as mass biosensor, with a resonant frequency of 3-4 GHz and a high sensitivity of 8-10 kHz cm2/ng.
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Authors
Zhi Yan, Zhitang Song, Weili Liu, Hongxuan Ren, Ning Gu, Xiaoyuan Zhou, Li Zhang, Yu Wang, Songlin Feng, Lihui Lai, Jianzhao Chen,