| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5365924 | Applied Surface Science | 2012 | 6 Pages |
Abstract
⺠GST CMP mechanism at pH 2 and pH 11. ⺠GST has four zero charge points, larger solubility at pH 11. ⺠Alkaline slurry shows faster RR, higher selectivity but lower RR/SER ratio. ⺠GST CMP includes oxidation, hydration, molecule removal, electrochemical process.
Related Topics
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Authors
Liangyong Wang, Zhitang Song, Min Zhong, Weili Liu, Weixia Yan, Fei Qin, Aodong He, Bo Liu,