Article ID Journal Published Year Pages File Type
5366061 Applied Surface Science 2006 4 Pages PDF
Abstract

The influence of the primary oxygen ion implantation on SIMS in-depth profiles in halide and chalcogenide glasses was examined. Various behaviours of particular profiles were generally explained in terms of the chemical affinity of analysed reactants and modifications of the glass structure induced by primary ions.

Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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