Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5366061 | Applied Surface Science | 2006 | 4 Pages |
Abstract
The influence of the primary oxygen ion implantation on SIMS in-depth profiles in halide and chalcogenide glasses was examined. Various behaviours of particular profiles were generally explained in terms of the chemical affinity of analysed reactants and modifications of the glass structure induced by primary ions.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Marek Tuleta,