Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5366095 | Applied Surface Science | 2006 | 7 Pages |
This research investigates the effect of ion implantation dosage level and further thermal treatment on the physical characteristics of chromium coatings on Si(1 1 1) substrates. Chromium films had been exposed to nitrogen ion fluencies of 1 Ã 1017, 3 Ã 1017, 6 Ã 1017 and 10 Ã 1017 N+ cmâ2 with a 15 keV energy level. Obtained samples had been heat treated at 450 °C at a pressure of 2 Ã 10â2 Torr in an argon atmosphere for 30 h. Atomic force microscopy (AFM) images showed significant increase in surface roughness as a result of nitrogen ion fluence increase. Secondary ion mass spectroscopy (SIMS) studies revealed a clear increased accumulation of Cr2N phase near the surface as a result of higher N+ fluence. XRD patterns showed preferred growth of [0 0 2] and [1 1 1] planes of Cr2N phase as a result of higher ion implantation fluence. These results had been explained based on the nucleation-growth of Cr2N phase and nitrogen atoms diffusion history during the thermal treatment process.