Effect of humidity and UV-assistance on the preparation of erbium doped alumina by aerosol MOCVD process

► We have studied erbium doped aluminium oxide films deposited by aerosol-assisted MOCVD under high air humidity and with UV-assistance. ► The deposition rate increased and the activation energy of the deposition reaction was a small as 4 kJ/mol. ► With UV and under high air humidity was improved films purity by facilitating removal of organic contamination from the growing surface. ► The films were shown a have high density and refractive index.