Article ID Journal Published Year Pages File Type
5366576 Applied Surface Science 2009 4 Pages PDF
Abstract

Sc-doped ZnO transparent conductive films are deposited on glass substrates by radio-frequency sputtering. The influence of post-annealing on the structural, morphologic, electrical, and optical properties of the films is investigated by energy dispersion X-ray spectroscopy, X-ray diffraction, Hall measurement, and optical transmission spectroscopy. The experimental results show that these films are polycrystalline with a preferred [0 0 1] orientation. The lowest resistivity of 2.6 × 10−4 Ω cm is obtained from the film annealed at 500 °C. The average optical transmittance of the films is over 90%. These results suggest that Sc-doped ZnO is a good candidate for fabricating high performance transparent conductive films.

Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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