Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5366591 | Applied Surface Science | 2009 | 4 Pages |
Abstract
A simple and highly effective method to the replication of soft mold based on the anodic aluminum oxide (AAO) membrane was developed. The soft mold with nanopillar arrays was composed of the toluene diluted PDMS layer supported by the soft PDMS. A water contact angle as high as 114° was achieved. The hexagonally well-order arrays of holes of nanometer dimensions, â¼100 nm pore diameter and 125 nm center-to-center pore, could be gained over large areas by UV-nanoimprint lithography (UV-NIL) with the replicated soft PDMS mold. It is expected that the developed soft mold would find applications in light emitting diodes devices.
Related Topics
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Authors
Weimin Zhou, Jing Zhang, Xiaoli Li, Yanbo Liu, Guoquan Min, Zhitang Song, Jianping Zhang,