Article ID Journal Published Year Pages File Type
5366806 Applied Surface Science 2011 5 Pages PDF
Abstract
► Rear side processing has a higher ablation rate as compared to front side ablation. ► Optimized ablation quality was achieved by ultraviolet rear side processing. ► Optimized lines have smooth groove bottoms, steep groove walls and small ridges.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Laser scribing of gallium doped zinc oxide thin films using picosecond laser
Authors
, ,