Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5366806 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠Rear side processing has a higher ablation rate as compared to front side ablation. ⺠Optimized ablation quality was achieved by ultraviolet rear side processing. ⺠Optimized lines have smooth groove bottoms, steep groove walls and small ridges.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Anna Risch, Ralf Hellmann,