Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5366910 | Applied Surface Science | 2006 | 4 Pages |
The irradiation effect of 350Â MeV Au+ ions on Ti/Si multilayers has been studied using Rutherford backscattering spectroscopy, X-ray reflectivity (XRR) and grazing incidence X-ray diffraction (GIXRD). Intermixing effects have been studied as a function of fluences of 0.46Â ÃÂ 1014, 1.82Â ÃÂ 1014 and 4.62Â ÃÂ 1014Â cmâ2. Rutherford backscattering spectra (RBS) confirm mixing at the interface. X-ray reflectivity patterns show damage at the interfaces with the absence of a continuous fringe pattern at high fluence doses in comparison to the pristine interface. Mixing leads to titanium di-silicide (TiSi2) phase formation as a shown by grazing incidence X-ray diffraction patterns. The observed intermixing is attributed to energy deposited by the incident ions in the electronic system of the target. Swift heavy ion irradiation induced intermixing increases with fluence.