Article ID Journal Published Year Pages File Type
5367009 Applied Surface Science 2011 8 Pages PDF
Abstract
► A novel silica-coated polystyrene nano-composite abrasive for copper chemical mechanical polishing applications was prepared. ► The slurry containing polystyrene/SiO2 composite abrasive exhibited better surface quality than that containing silica. ► The composite abrasive exhibited little higher material removal rate than traditional silica abrasive.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper
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