Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5367166 | Applied Surface Science | 2006 | 5 Pages |
Abstract
Arrays of conical-like spikes can be formed on silicon surface after irradiated with femtosecond laser pulses in ambient of SF6 or N2. In this article, we report our observations on how the shape of the spikes formed on silicon surface varies with the polarization of laser beam. The experimental results show that, with circular polarized laser irradiation, the shape of the spikes is conical; however, with linearly polarized laser irradiation, the spikes show elliptic conical shape, and the long-axes are perpendicular to the direction of the polarization of laser beam. The asymmetric shape of spikes produced by linearly polarized laser beam can be explained by considering the polarization dependence of Fresnel-refraction.
Related Topics
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Authors
Jing-Tao Zhu, Yi-Feng Shen, Wen Li, Xiao Chen, Gang Yin, De-Ying Chen, Li Zhao,