Article ID Journal Published Year Pages File Type
5367283 Applied Surface Science 2009 6 Pages PDF
Abstract

The effects of substrate rotation speed and rotation mode on the microstructure of large-sized metal sheet fabricated by electron beam physical vapor deposition technique were investigated. Helical and columnar microstructures were found in the deposited sheet. Both types of microstructures exhibit no preferential crystallographic orientation. The column inclination under asymmetric vapor incidence pattern was discussed. Integrated vapor incidence angle was found to be effective in evaluating the column inclination.

Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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