| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5367345 | Applied Surface Science | 2011 | 7 Pages |
Abstract
⺠Property distributions for low temperature sputtered ZAO films were studied. ⺠Films from different substrate regions have distinctive properties. ⺠The uneven distributions are heavily dependent on the substrate-target distance. ⺠Electrical properties of ZAO have strong relations with (0 0 2) and (1 1 0) textures.
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Authors
Tao Wang, Xungang Diao, Xuan Wang,