| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5367367 | Applied Surface Science | 2011 | 6 Pages |
Abstract
- Development of Zr metallic films by pulsed DC magnetron sputtering is reported.
- Zr films revealed predominantly [0Â 0Â 1] texture.
- Hexagonal shaped crystallites seem to grow along the surface normal of the substrate for the films deposited at 773Â K.
- Hardness of the films is in the range 6-10Â GPa.
- The scratch test indicated the films deposited at higher substrate temperatures had excellent bonding with the substrate.
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Authors
Akash Singh, P. Kuppusami, R. Thirumurugesan, R. Ramaseshan, M. Kamruddin, S. Dash, V. Ganesan, E. Mohandas,