Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5367387 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠The manuscript contains results showing the possibility to grow ZnO with O2 precursor without necessity of plasma reactions. ⺠XPS and synchrotron data show the preparation of ALD films of ZnO from H2O or O2 and diethylzinc. ⺠Evidence of O2â interstitials (dumbbell)for O2 preparation.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
E. Janocha, C. Pettenkofer,