Particle diagnostics of a ZnO laser ablation plume for nanostructured material deposition

We report results on the pulsed laser deposition of ZnO obtained with the help of a new apparatus that includes in situ reflectron time-of-flight mass spectrometry, with a view to progress the understanding of the role of clusters in the laser deposition of nanostructured materials. Experiments were carried out using a Nd-YAG laser at its fundamental frequency and frequency tripled, with a fluence on target of ∼7.7 J/cm2, in vacuum (10−4 Pa) or oxygen (1 Pa) atmospheres. The results show that under certain conditions there is preferential clusterisation of the material into certain mass numbers and finally that there exists a correlation between cluster presence in the plume and the deposition of nanostructures.