Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5367957 | Applied Surface Science | 2011 | 4 Pages |
In this paper, we proposed a new p-type ZnO doping method with metal organic chemical vapor deposition (MOCVD) technology by inserting a GaAs interlayer between substrate and ZnO epitaxial layer. The doping concentration of p-type ZnO film is able to be controlled by adjusting the thickness of the GaAs interlayer. With this method, we fabricated n-ZnO/p-ZnO:As homojunction light-emitting diode (LED) on ITO-glass substrate pre-coated with 20Â nm GaAs interlayer. The device exhibits a typical rectifying behavior by current-voltage (I-V) measurement. When the device is forward biased, UV-vis electroluminescence (EL) emissions can be observed clearly.
Research highlightsâ¶ Prepare n-ZnO/p-ZnO:As homojunction LED by metal organic chemical vapor deposition (MOCVD). â¶ Transparent devices on ITO substrate. â¶ Use GaAs interlayer as p-type doping source.