Article ID Journal Published Year Pages File Type
5367960 Applied Surface Science 2011 7 Pages PDF
Abstract
▶ We studied α-C thin films deposited by End-Hall (EH) ion beam at 24∼48 eV. ▶ The films are smooth and uniform on a large scale and intrinsically particulate-free. ▶ The films have reasonably high hardness and Young's modulus. ▶ The hardness and Young's modulus increase with the increase of ion energy. ▶ The films may be used as protective coatings in magnetic disk storage technology.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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