Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5368129 | Applied Surface Science | 2007 | 5 Pages |
Abstract
A comparison is made between the theoretical determination of the interference contrast function with fabricated two-dimensional hexagonal structures of submicron lattice constant. Experiments were performed using a siloxane based hybrid organic-inorganic material and a holographic lithography method.Thin hybrid structured layers were fabricated and characterized for different conditions of beam polarizations between 0° and 90°. As a result, the photo patterning appears to be strongly dependent on beam polarization in accordance with theoretical predictions.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
M. Salaün, M. Audier, M. Duneau, F. Delyon,