| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5368129 | Applied Surface Science | 2007 | 5 Pages |
Abstract
A comparison is made between the theoretical determination of the interference contrast function with fabricated two-dimensional hexagonal structures of submicron lattice constant. Experiments were performed using a siloxane based hybrid organic-inorganic material and a holographic lithography method.Thin hybrid structured layers were fabricated and characterized for different conditions of beam polarizations between 0° and 90°. As a result, the photo patterning appears to be strongly dependent on beam polarization in accordance with theoretical predictions.
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Authors
M. Salaün, M. Audier, M. Duneau, F. Delyon,