| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5368173 | Applied Surface Science | 2007 | 6 Pages |
Abstract
The optimum fluence range for fabrication of micro-lenses by laser induced backside wet etching using 1.4Â M pyrene in THF solution and 308Â nm irradiation wavelength is 1-1.6Â J/cm2. The etching mechanisms of LIBWE are based on a combination of pressure and temperature jumps at quartz-liquid interface.
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Physical and Theoretical Chemistry
Authors
G. Kopitkovas, T. Lippert, N. Murazawa, C. David, A. Wokaun, J. Gobrecht, R. Winfield,