| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5368831 | Applied Surface Science | 2006 | 4 Pages |
Abstract
A quartz crystal microbalance (QCM) has been used to determine total-mass sputtering yields of PMMA films by 1-16Â keV C60+,2+ ion beams. Quantitative sputtering yields for PMMA are presented as mass loss per incident ion Ym. Mass-lost rate QCM data show that a 13Â keV C60 cluster leads to emission equivalent to 800Â PMMA molecules per ion. The power law obtained for the increase in sputtering yield with primary ion energy is in good agreement those predicted by “thermal spike” regime and MD models, when crater sizes are used to estimate sputtering.
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Authors
I.L. Bolotin, S.H. Tetzler, L. Hanley,