| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5369206 | Applied Surface Science | 2006 | 5 Pages |
Abstract
Microstructures with well-defined micropatterns were fabricated on the surfaces of silica glass using a laser-induced backside wet etching (LIBWE) method by diode-pumped solid state (DPSS) UV laser at the repetition rate of 10Â kHz. For a demonstration of flexible rapid prototyping as mask-less exposure system, the focused laser beam was directed to the sample by galvanometer-based point scanning system. Additionally, a diagnostics study of plume propagation in the ablated products of toluene solid film was carried out with an intensified CCD (ICCD) camera.
Keywords
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
H. Niino, Y. Kawaguchi, T. Sato, A. Narazaki, T. Gumpenberger, R. Kurosaki,