Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5369263 | Applied Surface Science | 2006 | 6 Pages |
Carbon nitride films have been deposited by KrF excimer laser ablation of a rotating graphite target in 5Â Pa nitrogen ambient in an inverse pulsed laser deposition configuration, where the backward motion of the ablated species is utilised for film growth on substrates lying in the target plane. Topometric AFM scans of the films, exhibiting elliptical thickness distribution, have been recorded along the axes of symmetry of the deposition area. High resolution AFM scans revealed the existence of disk-like, or somewhat elongated rice-like features of 5-10Â nm average thickness and â¼100Â nm largest dimension, densely packed over the whole, approximately 14Â ÃÂ 10Â cm2 deposition area. The RMS roughness of the film decreased from 9Â nm near to the laser spot down to 2Â nm in the outer regions. Even the highest RMS value obtained for IPLD films was less than half of the typical, 25Â nm roughness measured on simultaneously deposited PLD films.