Article ID Journal Published Year Pages File Type
5370114 Applied Surface Science 2006 6 Pages PDF
Abstract
The interaction of C-atoms and CHn-radicals with uncleaned and argon cleaned silicon substrate and with diamond surface after H-treatment have been studied in situ by XPS and Auger spectroscopy. It was found the formation of a new chemical surface state of carbon atoms in the case of carbon atoms and radicals interaction with cleaned silicon. The same chemical state was revealed on the H-treated diamond surface. Graphite-like structure of carbon atoms was observed on the surface of unlearned silicon and H-treated diamond after interaction with carbon atoms and radicals. N(E) C KVV Auger spectrum for the new chemical state of carbon atoms significantly differs from typical spectra for sp2- and sp3-bonded carbon materials. The high energy part of this spectrum was interpreted under the hypothesis of sp3-bonded carbon atoms but with shifted fermi level position.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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