Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5374443 | Chemical Physics | 2012 | 9 Pages |
Abstract
⺠Electron temperature measurement at high pressure in diamond deposition reactor. ⺠H-atom density measurements at high pressure and high power in diamond deposition reactor. ⺠Surface H-atom density measurements at high pressure and high power in diamond deposition reactor. ⺠Microwave cavity based reactor efficiency compared to others reactors.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
A. Gicquel, N. Derkaoui, C. Rond, F. Benedic, G. Cicala, D. Moneger, K. Hassouni,