| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5381012 | Chemical Physics Letters | 2014 | 4 Pages |
Abstract
Ar2+ normalized energy resolved ion fluxes (IEDF) as a function of discharge radii. Power of 50 W and flux of 2.5 slm (contracted discharge) and 5.0 slm (diffuse discharge). In the diffuse discharge the plots of the IEDFs for r = 0, 200, 500 and 750 μm are superimposed.
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Authors
M.A. Ridenti, N. Spyrou, J. Amorim,