| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5381479 | Chemical Physics Letters | 2013 | 6 Pages |
Abstract
- Adduct (C2H5)3B:NH3-derived species are not expected to play a major role in the MOCVD of BN.
- MOCVD of BN contrasts with the MOCVD of AlN which is characterized by facile methane elimination.
- Excess ammonia is expected to have a positive impact on the growth efficiency during BN deposition.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
R.R.Q. Freitas, G.K. Gueorguiev, F. de Brito Mota, C.M.C. de Castilho, S. Stafström, A. Kakanakova-Georgieva,