Article ID Journal Published Year Pages File Type
5383045 Chemical Physics Letters 2012 5 Pages PDF
Abstract
► AR-XPS is used to investigate the interface between Al2O3 and III-V substrates. ► No interfacial oxide is observed on InGaAs after anneal under UHV at 600 °C. ► A clear difference is reported regarding indium oxidation under vacuum at 400 °C. ► Indium hydroxide is formed only on InAs, in contrast with InP and InGaAs. ► On InP, a transition from InPOx to POx is observed after anneal at 400 °C.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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