| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5383581 | Chemical Physics Letters | 2012 | 6 Pages |
Abstract
⺠We found that the dielectric constant of HCNx film is 1.88 ± 0.06 at 1 kHz. ⺠The dielectric constant of HCNx film decreases to 1.71 ± 0.06 at 5 MHz. ⺠The island size at the surface of HCNx is varying from 120 to 300 nm. ⺠The island growth number density is 2.19 Ã 106 /mm2. ⺠N/C is found to be 0.54.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Abhijit Majumdar, Sadhan Chandra Das, Thoudinja Shripathi, Rainer Hippler,