| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5389862 | Chemical Physics Letters | 2006 | 4 Pages |
Abstract
Gold films containing gold nitride have been produced by nitrogen reactive ion sputtering and characterized by X-ray photoemission spectroscopy. The compound decomposes under X-ray irradiation which indicates that it is possible to pattern the surface of gold nitride films by electron/photon beam lithography.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Yu.V. Butenko, L. Alves, A.C. Brieva, J. Yang, S. Krishnamurthy, L. Å iller,