Article ID Journal Published Year Pages File Type
53939 Catalysis Today 2015 10 Pages PDF
Abstract

•Review on MD simulations of nanocatalyst growth under magnetron sputter deposition.•MD allows a detailed understanding of catalyst growth under magnetron sputtering deposition.•Comparison with experiments of nanocatalyst composition, structure and morphology.•Future perspectives, including multimetallic catalysts and improved force fields.

Magnetron sputtering is a widely used physical vapor deposition technique for deposition and formation of nanocatalyst thin films and clusters. Nevertheless, so far only few studies investigated this formation process at the fundamental level. We here review atomic scale molecular dynamics simulations aimed at elucidating the nanocatalyst growth process through magnetron sputtering. We first introduce the basic magnetron sputtering background and machinery of molecular dynamics simulations, and then describe the studies conducted in this field so far. We also present a perspective view on how the field may be developed further.

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Physical Sciences and Engineering Chemical Engineering Catalysis
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