Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5395529 | Journal of Electron Spectroscopy and Related Phenomena | 2017 | 4 Pages |
Abstract
To extract a depth profile from ARXPS data, it has become common to use a slab model combined with regularization. This approach produces profiles that resemble a series of steps, whereas in many samples a continuously smooth profile can be expected. In this article we present a method for the extraction of smooth profiles from ARXPS data and discuss its merits in comparison to the slab model approach.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
P. Mercure-Boissonnault, R.W. Paynter,