| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5395692 | Journal of Electron Spectroscopy and Related Phenomena | 2015 | 27 Pages |
Abstract
A systematic way of analysis of multi-layer electron Rutherford backscattering spectra is described. The approach uses fitting in terms of physical meaningful parameters. Simultaneous analysis then becomes possible for spectra taken at different incoming energies and measurement geometries. Examples are given to demonstrate the level of detail that can be resolved by this technique.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
G.G. Marmitt, L.F.S. Rosa, S.K. Nandi, M. Vos,