| Article ID | Journal | Published Year | Pages | File Type | 
|---|---|---|---|---|
| 5396492 | Journal of Electron Spectroscopy and Related Phenomena | 2011 | 4 Pages | 
Abstract
												⺠Photoelectron study of fluorinated diamond-like carbon thin films was performed. ⺠The photon energy dependence of the spectra in the valence band was measured. ⺠The orbital components of the spectra in the valence band were clarified. ⺠The temperature dependence of the spectra in the F and C 1s levels was also measured. ⺠The chemical composition and components of the thin films were determined.
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											Authors
												Yuichi Haruyama, Yuji Kang, Makoto Okada, Shinji Matsui, 
											