| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5396509 | Journal of Electron Spectroscopy and Related Phenomena | 2011 | 4 Pages |
Abstract
⺠We report performance of a grating designed for simultaneous use in ±1 orders. ⺠This 1200 g/mm grating was intended for use at 121.6 nm under normal incidence. ⺠Efficiency tests at the desired normal incidence configuration revealed an anomaly. ⺠The anomaly disappeared after a different MgF2 coating was applied. ⺠A second, identical grating coated with the 2nd MgF2 recipe also shows no anomaly.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Frédéric E. Vincent, Walter M. Harris, Matthew Beasley, Jason Corliss, Yan Bétrémieux, Lotfi Ben Jaffel, Fred L. Roesler,