Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5397092 | Journal of Electron Spectroscopy and Related Phenomena | 2007 | 4 Pages |
Abstract
The X-ray photoabsorption spectra of ZrO2 films with different phase compositions were measured. The analysis of the results obtained shows that due to the site-sensitivity the X-ray photoabsorption spectroscopy is an attractive method for characterization of the ZrO2 structure. This allows application of the X-ray spectroscopy in investigation of the crystal structure in the various stages of the thin film growth including the initial stage of the ZrO2 growth.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
A. Kikas, J. Aarik, V. Kisand, K. Kooser, T. Käämbre, H. Mändar, T. Uustare, R. Rammula, V. Sammelselg, I. Martinson,