Repeatable intensity calibration of an X-ray photoelectron spectrometer

Ten years ago, NPL developed an infrastructure for calibrating the intensity response functions of electron spectrometers for Auger electron and for X-ray photoelectron spectroscopies. Two software systems were developed: one for Auger electron spectrometers or for Auger electron and X-ray photoelectron spectrometers combined, and one for X-ray photoelectron spectrometers on their own; the latter being applied if no suitable electron gun is available. The system for Auger electron and X-ray photoelectron spectrometers combined has been used regularly to calibrate the Metrology Spectrometer II at NPL and experience shows that this gives an instrumental intensity consistency of 0.4% over 10 years. Evaluations have not previously been reported at this level. The system for Auger electron and X-ray photoelectron spectrometers combined is used here in preference to the system solely for X-ray photoelectron spectrometers since it is more robust to the sample condition and can be used over a wider energy range. These issues, and how observed variations in the instrument intensity response may arise, are explained.