A traceable quantification procedure for a multi-mode X-ray photoelectron spectrometer

A modification to the quantification procedure used by a multi-mode X-ray photoelectron spectrometer (XPS) instrument is described which enables transfer of quantification between instruments, and which is referenced to a verified source. The procedure takes account of the intensity/energy response function of the instrument, which is appended to the data file, eliminating ambiguities in intensity calibration at a later date, and allowing background subtraction techniques based on electron scattering to be used on corrected spectra. A strategy is proposed to minimise inaccuracies arising from surface contamination and low signal intensity. Use of the procedure is illustrated by comparing quantification using different data processing software.