| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5401635 | Journal of Luminescence | 2012 | 5 Pages |
Abstract
⺠Light emission amorphous Si:C:O:H films were fabricated at low temperature by C2F6 and O2/C2F6 plasma treating silicone oil. ⺠A-Si:C:O:H films fabricated by C2F6 plasma treatment exhibited white photoluminescence at room temperature. ⺠A-Si:C:O:H films fabricated by O2/C2F6 plasma treatment exhibited blue photoluminescence. ⺠Blue emission at 469 nm was mainly related to the sp3 and sp2 hybridized carbons, Siî¸C bond and carbon dangling bonds.
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Authors
Tian Chen, Chao Ye, Yanhong Deng, Ying Yuan, Shuibin Ge, Yijun Xu, Zhaoyuan Ning, Xiaopin Pan, Zhenmin Wang,