Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5402024 | Journal of Luminescence | 2011 | 5 Pages |
Abstract
⺠An AlN nanocolumnar buffer layer prepared by oblique-angle (OA) deposition. ⺠GaN-based LED structures were grown on a sapphire substrate with an AlN nanocolumnar buffer layer. ⺠The OA-AlN nanocolumnar layer has a diameter of about 30-60 nm.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Lung-Chien Chen, Ching-Ho Tien, Wei-Chian Liao, Yi-Min Luo,