Article ID Journal Published Year Pages File Type
5420034 Progress in Surface Science 2011 40 Pages PDF
Abstract
► Multilayer optimization to the highest achieved reflectance: 70.3% record value. ► Growth control of thin layers down to 0.1 nm rms roughness. ► Diffusion barriers to enhance reflectance and improve thermal stability. ► Capping layers to protect against surface oxidation by photon exposure and cleaning. ► Multilayer optics for real lithographic systems: 69.6% on real optics.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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