| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5421301 | Surface Science | 2016 | 7 Pages |
Abstract
Rapid detection and imaging of trace Cu on industrial MEMS device using ToF-SIMS.179
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Vincent S. Smentkowski, Michael R. Keenan, Henrik Arlinghaus,