Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5422599 | Surface Science | 2012 | 5 Pages |
Abstract
⺠β-SiC nanocrystals are grown by high-T annealing of SiO2/Si samples under CO. ⺠The growth is studied in-situ by XPS and subsequently by electronic microscopy. ⺠The results reveal the formation of oxicarbide which was not previously observed. ⺠Based on this, we propose a new reaction equation between CO and SiO2/Si.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
M. D'angelo, G. Deokar, S. Steydli, A. Pongrácz, B. Pécz, M.G. Silly, F. Sirotti, C. Deville Cavellin,