| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5422997 | Surface Science | 2011 | 10 Pages |
Abstract
⺠Surface analytical techniques provide mechanistic insights into electron stimulated processes. ⺠Organometallic precursors undergo electron initiated metal-ligand bond cleavage. ⺠Total reaction cross-sections for adsorbed precursor species have been quantified. ⺠Atomic radicals successfully abate organic impurities in metal deposits.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
J.D. Wnuk, S.G. Rosenberg, J.M. Gorham, W.F. van Dorp, C.W. Hagen, D.H. Fairbrother,