| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5423096 | Surface Science | 2012 | 10 Pages |
Abstract
⺠We develop a kinetic Monte-Carlo code to investigate the growth of oxide thin films. ⺠We model surface diffusion of molecules and vacancies. ⺠Inclusion of all diffusion mechanisms lead to layers of the highest quality. ⺠Simulated growth occurs layer by layer with surface roughness in agreement with experiments.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Ekaterina Antoshchenkova, Marc Hayoun, Fabio Finocchi, Grégory Geneste,